+86 13313703791
+86 13313703791
seren@ymgkplc.com
Description
Product Overview
ZYGO ZMI 4104C (Part code: 8020-0103-13) belongs to the ZMI series high-precision displacement measuring interferometer electronic board under AMETEK ZYGO. This 6U VME64x standard plug-in board processes optical interference signals from He-Ne laser interferometers, converts light phase variation into digital displacement data with sub-nanometer resolution. It is the core signal acquisition & calculation unit for ultra-precision motion stage closed-loop positioning systems. Equipped with built-in periodic error correction algorithm, it effectively eliminates inherent nonlinear errors of interferometric measurement. Widely used for equipment maintenance and spare part replacement in semiconductor lithography platforms, wafer positioning stages, precision optical testing equipment and high-end nano-positioning motion systems.
Complete Technical Specification Table
| Parameter Classification | Detailed Technical Index |
|---|---|
| Official Full Part Number | Main Model: ZMI 4104C; Drawing Part Number: 8020-0103-13 |
| Mechanical Standard | 6U Eurocard, VME64x backplane communication interface |
| Matching Laser Wavelength | 633nm stabilized He-Ne dual-frequency laser system |
| Static Measurement Resolution | 0.15 nm minimum theoretical resolution |
| Dynamic Precision (Max Speed) | σ value ≤0.2 nm at full rated movement speed |
| Allowed Maximum Target Velocity | ±2.55 meters per second |
| Full Measurement Stroke | Max 40m under standard optical configuration |
| Hardware Channel Resource | 4 independent parallel measurement channels |
| Sensitivity for Input Optical Signal | Minimal detectable optical power: 0.07µW |
| Recommended Operating Environment | Temp: 18℃~28℃; Humidity: 30%~70%RH, no condensation |
| Physical Installation Form | Hot-pluggable installation inside standard VME rack chassis |
Core Competitive Advantages for Industrial Buyers
- Ultra-high precision measurement performance guarantees nanoscale positioning repeatability, critical for lithography equipment, wafer handling stages and ultra-precision machining platforms.
- Built-in hardware-level periodic error correction eliminates system inherent measurement drift, lowering the frequency of regular on-site calibration for end users.
- Four-channel synchronous sampling architecture satisfies multi-dimensional simultaneous displacement monitoring requirements for multi-axis stacked motion platforms and large gantry systems.
- Completely consistent with original mechanical dimensions, pin definition and communication protocols, realizing one-to-one plug-and-play replacement without mechanical modification or program revision for failed original boards.
- Robust PCB layout with multi-stage EMI filtering and ESD protection improves operational stability in industrial sites with various electromagnetic interference sources.
Compatible Matching Components & Core Industrial Application Scenarios
Supporting matched components: ZYGO 7702 /7714 series laser sources, differential plane mirror interferometers, single-mode fiber optic cables, industrial VME rack enclosuresApplicable high-end equipment: Semiconductor lithography reticle positioning stages, wafer inspection & processing equipment, laboratory nano-positioning systems, optical surface profiler calibration benches, aerospace component precision measuring equipment
Supply & Delivery Specification
We supply brand-new original boards and fully calibrated refurbished boards. Every board undergoes 48-hour continuous powered aging test, optical signal analog test and full-channel data accuracy calibration before delivery. Products are packed with ESD anti-static vacuum bag, customized shockproof foam and reinforced export cartons to avoid PCB chip damage during cross-border long-distance logistics. 12-month warranty is covered for inherent hardware failures under rated operating conditions.
FAQ
- Will board replacement lead to the loss of original equipment positioning parameters?All closed-loop control parameters and positioning logic are stored in the upper-level industrial controller. Direct replacement of the measurement board only needs simple channel calibration after power-on, without modifying the original equipment control programs.
- What does the part number 8020-0103-13 stand for?8020 is ZYGO unified serial code for ZMI series measurement boards; the suffix 0103-13 represents the fixed PCB hardware revision version and factory standardized calibration file of ZMI 4104C model.
- Delivery cycle for in-stock products?Goods are stored in domestic warehouse, all delivery documents and shipment arrangements can be completed within 3 working days after payment confirmation.
- WhatsApp: +86 13313703791
- Email: seren@ymgkplc.com
- Phone: +86 13313703791
- Wechat: +86 13313703791
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