+86 13313703791
+86 13313703791
seren@ymgkplc.com
Description
Product Overview
The MECS CS‑1000 is a dedicated stand‑alone motion control system developed for semiconductor wafer‑handling robotic equipment. Designed to pair with the MECS UTX‑1000 series wafer transfer robots, it delivers multi‑axis motion sequencing, position closed‑loop control, safety interlock management, and local human‑machine operation via front‑panel keypad and LCD display. It supports plug‑in functional sub‑modules and RS232 host communication, widely deployed on legacy wafer processing, inspection and metrology production lines. Today this unit is exclusively used for spare‑part replacement and equipment maintenance in existing fabs.
Series
CS‑1000 family is MECS legacy robot control platform for semiconductor manufacturing. It works cooperatively with UTX‑1000 wafer transfer robots, accepts multiple optional plug‑in sub‑boards (UTC‑P, UTC‑S, RS232C‑1, EXT‑1, EXT‑2) to expand I/O, serial communication and external trigger interfaces for different wafer‑handling process requirements.
Product Features
‑ Integrated front‑panel LCD display and membrane keypad for local parameter setup, manual jog operation and fault diagnosis‑ Accepts multiple plug‑in expansion modules: UTC‑P, UTC‑S, RS232C‑1, EXT‑1, EXT‑2‑ Native RS232C communication port for host computer link‑up‑ Multi‑axis coordinated motion control for wafer transfer robot‑ Complete hardware safety interlock, limit‑sensor monitoring and fault alarm indication‑ Optimized for clean‑room cabinet installation in semiconductor fabrication environment‑ 115 VAC single‑phase power input; matched signal cables for UTX‑1100 robot included on original configuration‑ Legacy end‑of‑life hardware; only available as replacement spare‑part
Product Parameters
| Item | Details |
|---|---|
| Part Number | CS‑1000 |
| Brand | MECS (Asyst Technologies) |
| Product Type | Wafer Robot Motion Controller |
| Rated Power Input | 115 VAC |
| Operator Interface | Front‑panel LCD + Membrane Keypad |
| Built‑in Ports | RS232C serial communication |
| Compatible Robot | UTX‑1000 / UTX‑1100 wafer transfer robot |
| Installable Sub‑modules | UTC‑P, UTC‑S, RS232C‑1, EXT‑1, EXT‑2 |
| Application Environment | Semiconductor clean‑room cabinet mount |
| Discontinued Status | Obsolete, spare‑part only |
| Accessories | Matching robot communication cables (original package) |
Product Specifications
- Installation: Cabinet‑mount desktop controller unit
- Supported tasks: Multi‑axis point‑to‑point motion, wafer transfer sequence, manual jog, position parameter editing, fault log reading
- Storage environment: 0‑50℃, non‑condensing humidity
- Note: No new‑unit production; only used / refurbished spare‑part supply for existing fab equipment
Function
Execute multi‑axis motion algorithm for wafer transfer robot; perform manual jog and automatic wafer‑handling sequence control; realize host‑PC communication via RS232C; process robot limit‑switch and safety interlock signals; display runtime status and fault alarm information locally; expand I/O and trigger signals through plug‑in sub‑modules.
Purpose
Main motion control host for MECS UTX‑series wafer‑handling robots in semiconductor production lines, used for wafer transfer between process chambers, inspection stations and cassettes.
Application Fields
‑ Semiconductor wafer fabrication & processing equipment‑ Wafer inspection & metrology legacy production lines‑ Existing fab equipment maintenance and spare‑part replacement‑ Old‑generation semiconductor manufacturing‑equipment retrofit projects
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