Overview
The ZYGO ZMI 4104C 8020‑0103‑13 is a 4‑axis VME64x laser interferometer measurement board built for nanometer‑level displacement metrologyZYGO. Designed to pair with ZYGO ZMI‑series He‑Ne laser sources, it processes optical interferometer signals to deliver high‑speed, sub‑nanometer position feedback for precision motion systems. The part number 8020‑0103‑13 refers to the specific hardware assembly variant of the ZMI 4104C board, configured for multi‑axis synchronous measurement in industrial and scientific metrology platforms.
Series
This board belongs to the ZYGO ZMI 4100 displacement‑measurement interferometer family, adopting 6U VME64x form factor for chassis‑based integrationZYGO. Each ZMI 4104C card supports four independent measurement axes, and multiple boards can be combined to expand up to 64 axes within one system. It features native cyclic error compensation to suppress interferometer nonlinear errors, and works compatibly with ZYGO 7702,7714,7724 laser units to complete the full optical measurement chain.
Application Fields
It is widely implemented in semiconductor lithography equipment, wafer inspection stations, ultra‑precision machine tools and nanotechnology research laboratories. Typical tasks include multi‑axis position monitoring, linear displacement tracking and dynamic motion analysis. The board serves as core metrology hardware for OEM equipment maintenance, system retrofits and spare‑part replacement of existing ZYGO laser interferometer setups.
Summary
ZYGO ZMI 4104C 8020‑0103‑13 is a high‑performance multi‑axis interferometer measurement board for demanding nanometer‑precision positioning applications. Its VME‑based modular architecture supports flexible axis expansion, while built‑in error compensation guarantees reliable measurement performance. Proper matching with corresponding ZMI laser and optical accessories is required to achieve full‑spec metrology results.Tags: ZYGO, ZMI 4104C, 8020‑0103‑13,laser interferometer,metrology board,VME64x
